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应变片式六维力传感器依赖人工贴装，制造成本高；电容式六维力传感器可实现自动化装配，但容易受到环境的干扰。针对以上问题，研究提出了一种电容-应变互补融合型传感器。该传感器将金属箔应变片与电容传感单元集成于同一弹性结构，既保留应变片高灵敏度的优势，又利用电容单元自动化装配的特性，显著简化了制造工艺。为验证可行性，设计了实验样机并进行特性测试，同时与SRI-M3703C商用六维力传感器进行对比。实验结果显示：力分量(Fx,Fy,Fz)的非线性度分别为1.52%,0.87%,0.59%,平均相对误差为0.12%～0.36%FS,最大动态误差≤0.40%。扭矩分量(Mx,My,Mz)的非线性度分别为0.20%,0.34%,0.10%,平均相对误差为0.04%～0.12%,最大误差≤0.18%。该传感器应变片数量减少了70%,仍保留精度与动态性能。
Abstract：The strain-gage-type six-axis force sensor relies on manual mounting, resulting in high manufacturing costs. The capacitive six-axis force sensor enables automated assembly but is vulnerable to environmental interference. To address the above issues, this study proposes a capacitive-strain complementary fusion sensor. The sensor integrates metal foil strain gauges and capacitive sensing units into the same elastic structure, retaining the high sensitivity advantage of strain gauges while leveraging the automated assembly characteristics of capacitive units, which significantly simplifies the manufacturing process. To verify the feasibility, an experimental prototype was designed for characteristic testing and compared with the commercial six-axis force sensor SRI-M3703C. The experimental results show that for force components(Fx, Fy, Fz), the nonlinearities are 1.52%, 0.87%, and 0.59%, respectively; the average relative errors are 0.12%-0.36% of full scale(FS), and the maximum dynamic error is no more than 0.40%. For torque components(Mx, My, Mz), the nonlinearities are 0.20%, 0.34%, and 0.10%, respectively; the average relative errors are 0.04%-0.12% of FS, and the maximum error is no more than 0.18%. The sensor reduces the number of strain gauges by 70% while maintaining accuracy and dynamic performance.
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基本信息:
DOI：10.14106/j.cnki.1001-2028.2025.0151
中图分类号:TP212
引用信息:
[1]吴静钰,杨建涛,朱兆才.基于电容-应变互补的六维力传感器研究[J].电子元件与材料,2025,44(12):1390-1397.DOI:10.14106/j.cnki.1001-2028.2025.0151.
基金信息:
国家自然科学基金(62573296)
2025-03-30
2025
2025-08-22
2025
1
2025-12-05
2025-12-05